9/10/2012	10:21:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2012	10:21:48 AM	Recipe started at 10:21 AM
9/10/2012	10:21:48 AM	Helium valve closed
9/10/2012	10:21:48 AM	H2 valve closed
9/10/2012	10:21:48 AM	BCl3 valve closed
9/10/2012	10:21:48 AM	PH3 valve closed
9/10/2012	10:21:48 AM	SiCl4 pre valve closed
9/10/2012	10:21:48 AM	SiCl4 post valve closed
9/10/2012	10:21:48 AM	Main Vac valve closed
9/10/2012	10:21:48 AM	Bypass valve closed
9/10/2012	10:21:48 AM	Bubbler valve closed
9/10/2012	10:21:48 AM	Helium MFC set to  0.000000
9/10/2012	10:21:48 AM	H2 MFC set to  0.000000
9/10/2012	10:21:48 AM	BCl3 MFC set to  0.000000
9/10/2012	10:21:48 AM	PH3 MFC set to  0.000000
9/10/2012	10:21:48 AM	SiCl4 MFC set to  0.000000
9/10/2012	10:21:48 AM	Bypass solenoid MFC set to  0.000000
9/10/2012	10:21:48 AM	Tube furnace set to 0
9/10/2012	10:21:51 AM	H2 valve closed
9/10/2012	10:21:51 AM	BCl3 valve closed
9/10/2012	10:21:51 AM	PH3 valve closed
9/10/2012	10:21:51 AM	SiCl4 pre valve closed
9/10/2012	10:21:51 AM	SiCl4 post valve closed
9/10/2012	10:21:51 AM	Main Vac valve closed
9/10/2012	10:21:51 AM	Bypass valve closed
9/10/2012	10:21:51 AM	Bubbler valve closed
9/10/2012	10:21:51 AM	Helium valve opened
9/10/2012	10:21:51 AM	Helium MFC set to  500.000000
9/10/2012	10:21:51 AM	H2 MFC set to  0.000000
9/10/2012	10:21:51 AM	BCl3 MFC set to  0.000000
9/10/2012	10:21:51 AM	PH3 MFC set to  0.000000
9/10/2012	10:21:51 AM	SiCl4 MFC set to  0.000000
9/10/2012	10:21:51 AM	Bypass solenoid MFC set to  0.000000
9/10/2012	10:21:52 AM	Tube furnace set to 0
9/10/2012	10:23:04 AM	Helium valve closed
9/10/2012	10:23:04 AM	H2 valve closed
9/10/2012	10:23:04 AM	BCl3 valve closed
9/10/2012	10:23:04 AM	PH3 valve closed
9/10/2012	10:23:04 AM	SiCl4 pre valve closed
9/10/2012	10:23:04 AM	SiCl4 post valve closed
9/10/2012	10:23:04 AM	Main Vac valve closed
9/10/2012	10:23:04 AM	Bypass valve closed
9/10/2012	10:23:04 AM	Bubbler valve closed
9/10/2012	10:23:04 AM	Helium MFC set to  0.000000
9/10/2012	10:23:04 AM	H2 MFC set to  0.000000
9/10/2012	10:23:04 AM	BCl3 MFC set to  0.000000
9/10/2012	10:23:04 AM	PH3 MFC set to  0.000000
9/10/2012	10:23:04 AM	SiCl4 MFC set to  0.000000
9/10/2012	10:23:04 AM	Bypass solenoid MFC set to  0.000000
9/10/2012	10:23:04 AM	Tube furnace set to 0
9/10/2012	10:23:05 AM	Run finished at 10:23 AM
9/10/2012	10:23:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2012	10:26:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2012	10:26:26 AM	Recipe started at 10:26 AM
9/10/2012	10:26:26 AM	Helium valve closed
9/10/2012	10:26:26 AM	H2 valve closed
9/10/2012	10:26:26 AM	BCl3 valve closed
9/10/2012	10:26:26 AM	PH3 valve closed
9/10/2012	10:26:26 AM	SiCl4 pre valve closed
9/10/2012	10:26:26 AM	SiCl4 post valve closed
9/10/2012	10:26:26 AM	Main Vac valve closed
9/10/2012	10:26:26 AM	Bubbler valve closed
9/10/2012	10:26:26 AM	Bypass valve opened
9/10/2012	10:26:26 AM	Helium MFC set to  0.000000
9/10/2012	10:26:26 AM	H2 MFC set to  0.000000
9/10/2012	10:26:26 AM	BCl3 MFC set to  0.000000
9/10/2012	10:26:26 AM	PH3 MFC set to  0.000000
9/10/2012	10:26:26 AM	SiCl4 MFC set to  0.000000
9/10/2012	10:26:26 AM	Bypass solenoid MFC set to  0.000000
9/10/2012	10:26:26 AM	Tube furnace set to 0
9/10/2012	10:27:41 AM	Helium valve closed
9/10/2012	10:27:41 AM	H2 valve closed
9/10/2012	10:27:41 AM	BCl3 valve closed
9/10/2012	10:27:41 AM	PH3 valve closed
9/10/2012	10:27:41 AM	SiCl4 pre valve closed
9/10/2012	10:27:41 AM	SiCl4 post valve closed
9/10/2012	10:27:41 AM	Main Vac valve closed
9/10/2012	10:27:41 AM	Bubbler valve closed
9/10/2012	10:27:41 AM	Bypass valve opened
9/10/2012	10:27:41 AM	Helium MFC set to  0.000000
9/10/2012	10:27:41 AM	H2 MFC set to  0.000000
9/10/2012	10:27:41 AM	BCl3 MFC set to  0.000000
9/10/2012	10:27:41 AM	PH3 MFC set to  0.000000
9/10/2012	10:27:41 AM	SiCl4 MFC set to  0.000000
9/10/2012	10:27:41 AM	Bypass solenoid MFC set to  0.000000
9/10/2012	10:27:41 AM	Tube furnace set to 0
9/10/2012	10:28:41 AM	Helium valve closed
9/10/2012	10:28:41 AM	H2 valve closed
9/10/2012	10:28:41 AM	BCl3 valve closed
9/10/2012	10:28:41 AM	PH3 valve closed
9/10/2012	10:28:41 AM	SiCl4 pre valve closed
9/10/2012	10:28:41 AM	SiCl4 post valve closed
9/10/2012	10:28:41 AM	Bypass valve closed
9/10/2012	10:28:41 AM	Bubbler valve closed
9/10/2012	10:28:41 AM	Main Vac valve opened
9/10/2012	10:28:41 AM	Helium MFC set to  0.000000
9/10/2012	10:28:41 AM	H2 MFC set to  0.000000
9/10/2012	10:28:41 AM	BCl3 MFC set to  0.000000
9/10/2012	10:28:41 AM	PH3 MFC set to  0.000000
9/10/2012	10:28:41 AM	SiCl4 MFC set to  0.000000
9/10/2012	10:28:41 AM	Bypass solenoid MFC set to  0.000000
9/10/2012	10:28:41 AM	Tube furnace set to 0
9/10/2012	10:28:42 AM	Run finished at 10:28 AM
9/10/2012	10:28:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2012	12:32:23 PM	Main Vac valve closed
9/10/2012	12:32:35 PM	Main Vac valve opened
9/10/2012	12:33:38 PM	Recipe started at 12:33 PM
9/10/2012	12:33:38 PM	Helium valve closed
9/10/2012	12:33:38 PM	H2 valve closed
9/10/2012	12:33:38 PM	BCl3 valve closed
9/10/2012	12:33:38 PM	PH3 valve closed
9/10/2012	12:33:38 PM	SiCl4 pre valve closed
9/10/2012	12:33:38 PM	SiCl4 post valve closed
9/10/2012	12:33:38 PM	Bypass valve closed
9/10/2012	12:33:38 PM	Bubbler valve closed
9/10/2012	12:33:38 PM	Main Vac valve opened
9/10/2012	12:33:38 PM	Helium MFC set to  0.000000
9/10/2012	12:33:38 PM	H2 MFC set to  0.000000
9/10/2012	12:33:38 PM	BCl3 MFC set to  0.000000
9/10/2012	12:33:38 PM	PH3 MFC set to  0.000000
9/10/2012	12:33:38 PM	SiCl4 MFC set to  0.000000
9/10/2012	12:33:38 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	12:33:38 PM	Tube furnace set to 0
9/10/2012	12:33:41 PM	Helium valve closed
9/10/2012	12:33:41 PM	H2 valve closed
9/10/2012	12:33:41 PM	BCl3 valve closed
9/10/2012	12:33:41 PM	PH3 valve closed
9/10/2012	12:33:41 PM	SiCl4 pre valve closed
9/10/2012	12:33:41 PM	SiCl4 post valve closed
9/10/2012	12:33:41 PM	Main Vac valve closed
9/10/2012	12:33:41 PM	Bypass valve closed
9/10/2012	12:33:41 PM	Bubbler valve closed
9/10/2012	12:33:41 PM	Helium MFC set to  0.000000
9/10/2012	12:33:41 PM	H2 MFC set to  0.000000
9/10/2012	12:33:41 PM	BCl3 MFC set to  0.000000
9/10/2012	12:33:41 PM	PH3 MFC set to  0.000000
9/10/2012	12:33:41 PM	SiCl4 MFC set to  0.000000
9/10/2012	12:33:41 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	12:33:41 PM	Tube furnace set to 0
9/10/2012	12:33:44 PM	Helium valve closed
9/10/2012	12:33:44 PM	BCl3 valve closed
9/10/2012	12:33:44 PM	PH3 valve closed
9/10/2012	12:33:44 PM	SiCl4 pre valve closed
9/10/2012	12:33:44 PM	SiCl4 post valve closed
9/10/2012	12:33:44 PM	Main Vac valve closed
9/10/2012	12:33:44 PM	Bypass valve closed
9/10/2012	12:33:44 PM	Bubbler valve closed
9/10/2012	12:33:44 PM	H2 valve opened
9/10/2012	12:33:44 PM	Helium MFC set to  0.000000
9/10/2012	12:33:44 PM	H2 MFC set to  500.000000
9/10/2012	12:33:44 PM	BCl3 MFC set to  0.000000
9/10/2012	12:33:44 PM	PH3 MFC set to  0.000000
9/10/2012	12:33:44 PM	SiCl4 MFC set to  0.000000
9/10/2012	12:33:44 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	12:33:44 PM	Tube furnace set to 0
9/10/2012	12:35:00 PM	Helium valve closed
9/10/2012	12:35:00 PM	BCl3 valve closed
9/10/2012	12:35:00 PM	PH3 valve closed
9/10/2012	12:35:00 PM	SiCl4 pre valve closed
9/10/2012	12:35:00 PM	SiCl4 post valve closed
9/10/2012	12:35:00 PM	Main Vac valve closed
9/10/2012	12:35:00 PM	Bypass valve closed
9/10/2012	12:35:00 PM	H2 valve opened
9/10/2012	12:35:00 PM	Bubbler valve opened
9/10/2012	12:35:00 PM	Helium MFC set to  0.000000
9/10/2012	12:35:00 PM	H2 MFC set to  500.000000
9/10/2012	12:35:00 PM	BCl3 MFC set to  0.000000
9/10/2012	12:35:00 PM	PH3 MFC set to  0.000000
9/10/2012	12:35:00 PM	SiCl4 MFC set to  0.000000
9/10/2012	12:35:00 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	12:35:00 PM	Tube furnace set to 0
9/10/2012	12:35:01 PM	Helium valve closed
9/10/2012	12:35:01 PM	BCl3 valve closed
9/10/2012	12:35:01 PM	PH3 valve closed
9/10/2012	12:35:01 PM	SiCl4 pre valve closed
9/10/2012	12:35:01 PM	SiCl4 post valve closed
9/10/2012	12:35:01 PM	Main Vac valve closed
9/10/2012	12:35:01 PM	Bypass valve closed
9/10/2012	12:35:01 PM	H2 valve opened
9/10/2012	12:35:01 PM	Bubbler valve opened
9/10/2012	12:35:01 PM	Helium MFC set to  0.000000
9/10/2012	12:35:01 PM	H2 MFC set to  500.000000
9/10/2012	12:35:01 PM	BCl3 MFC set to  0.000000
9/10/2012	12:35:01 PM	PH3 MFC set to  0.000000
9/10/2012	12:35:01 PM	SiCl4 MFC set to  0.000000
9/10/2012	12:35:01 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	12:35:01 PM	Tube furnace set to 1000
9/10/2012	1:00:01 PM	Helium valve closed
9/10/2012	1:00:01 PM	PH3 valve closed
9/10/2012	1:00:01 PM	Main Vac valve closed
9/10/2012	1:00:01 PM	Bypass valve closed
9/10/2012	1:00:01 PM	H2 valve opened
9/10/2012	1:00:01 PM	BCl3 valve opened
9/10/2012	1:00:01 PM	SiCl4 pre valve opened
9/10/2012	1:00:01 PM	SiCl4 post valve opened
9/10/2012	1:00:01 PM	Bubbler valve opened
9/10/2012	1:00:01 PM	Helium MFC set to  0.000000
9/10/2012	1:00:01 PM	H2 MFC set to  430.000000
9/10/2012	1:00:01 PM	BCl3 MFC set to  20.000000
9/10/2012	1:00:01 PM	PH3 MFC set to  0.000000
9/10/2012	1:00:01 PM	SiCl4 MFC set to  50.000000
9/10/2012	1:00:01 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	1:00:01 PM	Tube furnace set to 1000
9/10/2012	1:07:01 PM	Helium valve closed
9/10/2012	1:07:01 PM	PH3 valve closed
9/10/2012	1:07:01 PM	Main Vac valve closed
9/10/2012	1:07:01 PM	Bypass valve closed
9/10/2012	1:07:01 PM	H2 valve opened
9/10/2012	1:07:01 PM	BCl3 valve opened
9/10/2012	1:07:01 PM	SiCl4 pre valve opened
9/10/2012	1:07:01 PM	SiCl4 post valve opened
9/10/2012	1:07:01 PM	Bubbler valve opened
9/10/2012	1:07:01 PM	Helium MFC set to  0.000000
9/10/2012	1:07:01 PM	H2 MFC set to  450.000000
9/10/2012	1:07:01 PM	BCl3 MFC set to  1.000000
9/10/2012	1:07:01 PM	PH3 MFC set to  0.000000
9/10/2012	1:07:02 PM	SiCl4 MFC set to  50.000000
9/10/2012	1:07:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	1:07:02 PM	Tube furnace set to 1000
9/10/2012	1:14:02 PM	Helium valve closed
9/10/2012	1:14:02 PM	BCl3 valve closed
9/10/2012	1:14:02 PM	PH3 valve closed
9/10/2012	1:14:02 PM	SiCl4 pre valve closed
9/10/2012	1:14:02 PM	SiCl4 post valve closed
9/10/2012	1:14:02 PM	Main Vac valve closed
9/10/2012	1:14:02 PM	Bypass valve closed
9/10/2012	1:14:02 PM	H2 valve opened
9/10/2012	1:14:02 PM	Bubbler valve opened
9/10/2012	1:14:02 PM	Helium MFC set to  0.000000
9/10/2012	1:14:02 PM	H2 MFC set to  500.000000
9/10/2012	1:14:02 PM	BCl3 MFC set to  0.000000
9/10/2012	1:14:02 PM	PH3 MFC set to  0.000000
9/10/2012	1:14:02 PM	SiCl4 MFC set to  0.000000
9/10/2012	1:14:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	1:14:02 PM	Tube furnace set to 1000
9/10/2012	1:16:02 PM	Helium valve closed
9/10/2012	1:16:02 PM	BCl3 valve closed
9/10/2012	1:16:02 PM	Main Vac valve closed
9/10/2012	1:16:02 PM	Bypass valve closed
9/10/2012	1:16:02 PM	H2 valve opened
9/10/2012	1:16:02 PM	PH3 valve opened
9/10/2012	1:16:02 PM	SiCl4 pre valve opened
9/10/2012	1:16:02 PM	SiCl4 post valve opened
9/10/2012	1:16:02 PM	Bubbler valve opened
9/10/2012	1:16:02 PM	Helium MFC set to  0.000000
9/10/2012	1:16:02 PM	H2 MFC set to  447.000000
9/10/2012	1:16:02 PM	BCl3 MFC set to  0.000000
9/10/2012	1:16:02 PM	PH3 MFC set to  3.000000
9/10/2012	1:16:02 PM	SiCl4 MFC set to  50.000000
9/10/2012	1:16:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	1:16:02 PM	Tube furnace set to 1000
9/10/2012	1:23:02 PM	Helium valve closed
9/10/2012	1:23:02 PM	BCl3 valve closed
9/10/2012	1:23:02 PM	Main Vac valve closed
9/10/2012	1:23:02 PM	Bypass valve closed
9/10/2012	1:23:02 PM	H2 valve opened
9/10/2012	1:23:02 PM	PH3 valve opened
9/10/2012	1:23:02 PM	SiCl4 pre valve opened
9/10/2012	1:23:02 PM	SiCl4 post valve opened
9/10/2012	1:23:02 PM	Bubbler valve opened
9/10/2012	1:23:02 PM	Helium MFC set to  0.000000
9/10/2012	1:23:02 PM	H2 MFC set to  430.000000
9/10/2012	1:23:02 PM	BCl3 MFC set to  0.000000
9/10/2012	1:23:02 PM	PH3 MFC set to  20.000000
9/10/2012	1:23:02 PM	SiCl4 MFC set to  50.000000
9/10/2012	1:23:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	1:23:02 PM	Tube furnace set to 1000
9/10/2012	1:30:02 PM	Helium valve closed
9/10/2012	1:30:02 PM	BCl3 valve closed
9/10/2012	1:30:02 PM	PH3 valve closed
9/10/2012	1:30:02 PM	SiCl4 pre valve closed
9/10/2012	1:30:02 PM	SiCl4 post valve closed
9/10/2012	1:30:02 PM	Main Vac valve closed
9/10/2012	1:30:02 PM	Bypass valve closed
9/10/2012	1:30:02 PM	H2 valve opened
9/10/2012	1:30:02 PM	Bubbler valve opened
9/10/2012	1:30:02 PM	Helium MFC set to  0.000000
9/10/2012	1:30:02 PM	H2 MFC set to  500.000000
9/10/2012	1:30:02 PM	BCl3 MFC set to  0.000000
9/10/2012	1:30:02 PM	PH3 MFC set to  0.000000
9/10/2012	1:30:02 PM	SiCl4 MFC set to  0.000000
9/10/2012	1:30:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	1:30:03 PM	Tube furnace set to 750
9/10/2012	1:45:03 PM	H2 valve closed
9/10/2012	1:45:03 PM	BCl3 valve closed
9/10/2012	1:45:03 PM	PH3 valve closed
9/10/2012	1:45:03 PM	SiCl4 pre valve closed
9/10/2012	1:45:03 PM	SiCl4 post valve closed
9/10/2012	1:45:03 PM	Main Vac valve closed
9/10/2012	1:45:03 PM	Bypass valve closed
9/10/2012	1:45:03 PM	Helium valve opened
9/10/2012	1:45:03 PM	Bubbler valve opened
9/10/2012	1:45:03 PM	Helium MFC set to  500.000000
9/10/2012	1:45:03 PM	H2 MFC set to  0.000000
9/10/2012	1:45:03 PM	BCl3 MFC set to  0.000000
9/10/2012	1:45:03 PM	PH3 MFC set to  0.000000
9/10/2012	1:45:03 PM	SiCl4 MFC set to  0.000000
9/10/2012	1:45:03 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	1:45:03 PM	Tube furnace set to 0
9/10/2012	2:05:03 PM	Helium valve closed
9/10/2012	2:05:03 PM	H2 valve closed
9/10/2012	2:05:03 PM	BCl3 valve closed
9/10/2012	2:05:03 PM	PH3 valve closed
9/10/2012	2:05:03 PM	SiCl4 pre valve closed
9/10/2012	2:05:03 PM	SiCl4 post valve closed
9/10/2012	2:05:03 PM	Main Vac valve closed
9/10/2012	2:05:03 PM	Bypass valve closed
9/10/2012	2:05:03 PM	Bubbler valve closed
9/10/2012	2:05:03 PM	Helium MFC set to  0.000000
9/10/2012	2:05:03 PM	H2 MFC set to  0.000000
9/10/2012	2:05:03 PM	BCl3 MFC set to  0.000000
9/10/2012	2:05:03 PM	PH3 MFC set to  0.000000
9/10/2012	2:05:03 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:05:03 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:05:03 PM	Tube furnace set to 0
9/10/2012	2:15:18 PM	Helium valve closed
9/10/2012	2:15:18 PM	H2 valve closed
9/10/2012	2:15:18 PM	BCl3 valve closed
9/10/2012	2:15:18 PM	PH3 valve closed
9/10/2012	2:15:18 PM	SiCl4 pre valve closed
9/10/2012	2:15:18 PM	SiCl4 post valve closed
9/10/2012	2:15:18 PM	Main Vac valve closed
9/10/2012	2:15:18 PM	Bubbler valve closed
9/10/2012	2:15:18 PM	Bypass valve opened
9/10/2012	2:15:18 PM	Helium MFC set to  0.000000
9/10/2012	2:15:18 PM	H2 MFC set to  0.000000
9/10/2012	2:15:18 PM	BCl3 MFC set to  0.000000
9/10/2012	2:15:18 PM	PH3 MFC set to  0.000000
9/10/2012	2:15:18 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:15:18 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:15:18 PM	Tube furnace set to 0
9/10/2012	2:16:17 PM	Helium valve closed
9/10/2012	2:16:17 PM	H2 valve closed
9/10/2012	2:16:17 PM	BCl3 valve closed
9/10/2012	2:16:17 PM	PH3 valve closed
9/10/2012	2:16:17 PM	SiCl4 pre valve closed
9/10/2012	2:16:17 PM	SiCl4 post valve closed
9/10/2012	2:16:17 PM	Main Vac valve closed
9/10/2012	2:16:17 PM	Bubbler valve closed
9/10/2012	2:16:17 PM	Bypass valve opened
9/10/2012	2:16:17 PM	Helium MFC set to  0.000000
9/10/2012	2:16:17 PM	H2 MFC set to  0.000000
9/10/2012	2:16:17 PM	BCl3 MFC set to  0.000000
9/10/2012	2:16:17 PM	PH3 MFC set to  0.000000
9/10/2012	2:16:17 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:16:17 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:16:17 PM	Tube furnace set to 0
9/10/2012	2:17:17 PM	Helium valve closed
9/10/2012	2:17:17 PM	H2 valve closed
9/10/2012	2:17:17 PM	BCl3 valve closed
9/10/2012	2:17:17 PM	PH3 valve closed
9/10/2012	2:17:17 PM	SiCl4 pre valve closed
9/10/2012	2:17:17 PM	SiCl4 post valve closed
9/10/2012	2:17:17 PM	Bypass valve closed
9/10/2012	2:17:17 PM	Bubbler valve closed
9/10/2012	2:17:17 PM	Main Vac valve opened
9/10/2012	2:17:17 PM	Helium MFC set to  0.000000
9/10/2012	2:17:17 PM	H2 MFC set to  0.000000
9/10/2012	2:17:17 PM	BCl3 MFC set to  0.000000
9/10/2012	2:17:17 PM	PH3 MFC set to  0.000000
9/10/2012	2:17:18 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:17:18 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:17:18 PM	Tube furnace set to 0
9/10/2012	2:21:59 PM	Run finished at 2:21 PM
9/10/2012	2:22:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2012	2:22:07 PM	Recipe started at 2:22 PM
9/10/2012	2:22:07 PM	Helium valve closed
9/10/2012	2:22:07 PM	H2 valve closed
9/10/2012	2:22:07 PM	BCl3 valve closed
9/10/2012	2:22:07 PM	PH3 valve closed
9/10/2012	2:22:07 PM	SiCl4 pre valve closed
9/10/2012	2:22:07 PM	SiCl4 post valve closed
9/10/2012	2:22:07 PM	Main Vac valve closed
9/10/2012	2:22:07 PM	Bypass valve closed
9/10/2012	2:22:07 PM	Bubbler valve closed
9/10/2012	2:22:07 PM	Helium MFC set to  0.000000
9/10/2012	2:22:07 PM	H2 MFC set to  0.000000
9/10/2012	2:22:07 PM	BCl3 MFC set to  0.000000
9/10/2012	2:22:07 PM	PH3 MFC set to  0.000000
9/10/2012	2:22:07 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:22:07 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:22:07 PM	Tube furnace set to 0
9/10/2012	2:22:10 PM	H2 valve closed
9/10/2012	2:22:10 PM	BCl3 valve closed
9/10/2012	2:22:10 PM	PH3 valve closed
9/10/2012	2:22:10 PM	SiCl4 pre valve closed
9/10/2012	2:22:10 PM	SiCl4 post valve closed
9/10/2012	2:22:10 PM	Main Vac valve closed
9/10/2012	2:22:10 PM	Bypass valve closed
9/10/2012	2:22:10 PM	Bubbler valve closed
9/10/2012	2:22:10 PM	Helium valve opened
9/10/2012	2:22:10 PM	Helium MFC set to  500.000000
9/10/2012	2:22:10 PM	H2 MFC set to  0.000000
9/10/2012	2:22:10 PM	BCl3 MFC set to  0.000000
9/10/2012	2:22:10 PM	PH3 MFC set to  0.000000
9/10/2012	2:22:10 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:22:10 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:22:10 PM	Tube furnace set to 0
9/10/2012	2:23:19 PM	Helium valve closed
9/10/2012	2:23:19 PM	H2 valve closed
9/10/2012	2:23:19 PM	BCl3 valve closed
9/10/2012	2:23:19 PM	PH3 valve closed
9/10/2012	2:23:19 PM	SiCl4 pre valve closed
9/10/2012	2:23:19 PM	SiCl4 post valve closed
9/10/2012	2:23:19 PM	Main Vac valve closed
9/10/2012	2:23:19 PM	Bypass valve closed
9/10/2012	2:23:19 PM	Bubbler valve closed
9/10/2012	2:23:19 PM	Helium MFC set to  0.000000
9/10/2012	2:23:19 PM	H2 MFC set to  0.000000
9/10/2012	2:23:19 PM	BCl3 MFC set to  0.000000
9/10/2012	2:23:19 PM	PH3 MFC set to  0.000000
9/10/2012	2:23:19 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:23:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:23:19 PM	Tube furnace set to 0
9/10/2012	2:23:20 PM	Run finished at 2:23 PM
9/10/2012	2:23:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2012	2:31:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2012	2:31:57 PM	Recipe started at 2:31 PM
9/10/2012	2:31:57 PM	Helium valve closed
9/10/2012	2:31:57 PM	H2 valve closed
9/10/2012	2:31:57 PM	BCl3 valve closed
9/10/2012	2:31:57 PM	PH3 valve closed
9/10/2012	2:31:57 PM	SiCl4 pre valve closed
9/10/2012	2:31:57 PM	SiCl4 post valve closed
9/10/2012	2:31:57 PM	Main Vac valve closed
9/10/2012	2:31:57 PM	Bubbler valve closed
9/10/2012	2:31:57 PM	Bypass valve opened
9/10/2012	2:31:57 PM	Helium MFC set to  0.000000
9/10/2012	2:31:57 PM	H2 MFC set to  0.000000
9/10/2012	2:31:57 PM	BCl3 MFC set to  0.000000
9/10/2012	2:31:57 PM	PH3 MFC set to  0.000000
9/10/2012	2:31:57 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:31:57 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:31:57 PM	Tube furnace set to 0
9/10/2012	2:33:20 PM	Helium valve closed
9/10/2012	2:33:20 PM	H2 valve closed
9/10/2012	2:33:20 PM	BCl3 valve closed
9/10/2012	2:33:20 PM	PH3 valve closed
9/10/2012	2:33:20 PM	SiCl4 pre valve closed
9/10/2012	2:33:20 PM	SiCl4 post valve closed
9/10/2012	2:33:20 PM	Main Vac valve closed
9/10/2012	2:33:20 PM	Bubbler valve closed
9/10/2012	2:33:20 PM	Bypass valve opened
9/10/2012	2:33:20 PM	Helium MFC set to  0.000000
9/10/2012	2:33:20 PM	H2 MFC set to  0.000000
9/10/2012	2:33:20 PM	BCl3 MFC set to  0.000000
9/10/2012	2:33:20 PM	PH3 MFC set to  0.000000
9/10/2012	2:33:20 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:33:20 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:33:20 PM	Tube furnace set to 0
9/10/2012	2:34:20 PM	Helium valve closed
9/10/2012	2:34:20 PM	H2 valve closed
9/10/2012	2:34:20 PM	BCl3 valve closed
9/10/2012	2:34:20 PM	PH3 valve closed
9/10/2012	2:34:20 PM	SiCl4 pre valve closed
9/10/2012	2:34:20 PM	SiCl4 post valve closed
9/10/2012	2:34:20 PM	Bypass valve closed
9/10/2012	2:34:20 PM	Bubbler valve closed
9/10/2012	2:34:20 PM	Main Vac valve opened
9/10/2012	2:34:20 PM	Helium MFC set to  0.000000
9/10/2012	2:34:20 PM	H2 MFC set to  0.000000
9/10/2012	2:34:20 PM	BCl3 MFC set to  0.000000
9/10/2012	2:34:20 PM	PH3 MFC set to  0.000000
9/10/2012	2:34:20 PM	SiCl4 MFC set to  0.000000
9/10/2012	2:34:20 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	2:34:20 PM	Tube furnace set to 0
9/10/2012	2:34:21 PM	Run finished at 2:34 PM
9/10/2012	2:34:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2012	4:04:34 PM	Main Vac valve closed
9/10/2012	4:04:46 PM	Main Vac valve opened
9/10/2012	4:05:40 PM	Recipe started at 4:05 PM
9/10/2012	4:05:40 PM	Helium valve closed
9/10/2012	4:05:40 PM	H2 valve closed
9/10/2012	4:05:40 PM	BCl3 valve closed
9/10/2012	4:05:40 PM	PH3 valve closed
9/10/2012	4:05:40 PM	SiCl4 pre valve closed
9/10/2012	4:05:40 PM	SiCl4 post valve closed
9/10/2012	4:05:40 PM	Bypass valve closed
9/10/2012	4:05:40 PM	Bubbler valve closed
9/10/2012	4:05:40 PM	Main Vac valve opened
9/10/2012	4:05:40 PM	Helium MFC set to  0.000000
9/10/2012	4:05:40 PM	H2 MFC set to  0.000000
9/10/2012	4:05:40 PM	BCl3 MFC set to  0.000000
9/10/2012	4:05:40 PM	PH3 MFC set to  0.000000
9/10/2012	4:05:40 PM	SiCl4 MFC set to  0.000000
9/10/2012	4:05:40 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:05:40 PM	Tube furnace set to 0
9/10/2012	4:05:43 PM	Helium valve closed
9/10/2012	4:05:43 PM	H2 valve closed
9/10/2012	4:05:43 PM	BCl3 valve closed
9/10/2012	4:05:43 PM	PH3 valve closed
9/10/2012	4:05:43 PM	SiCl4 pre valve closed
9/10/2012	4:05:43 PM	SiCl4 post valve closed
9/10/2012	4:05:43 PM	Main Vac valve closed
9/10/2012	4:05:43 PM	Bypass valve closed
9/10/2012	4:05:43 PM	Bubbler valve closed
9/10/2012	4:05:43 PM	Helium MFC set to  0.000000
9/10/2012	4:05:43 PM	H2 MFC set to  0.000000
9/10/2012	4:05:43 PM	BCl3 MFC set to  0.000000
9/10/2012	4:05:43 PM	PH3 MFC set to  0.000000
9/10/2012	4:05:43 PM	SiCl4 MFC set to  0.000000
9/10/2012	4:05:43 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:05:43 PM	Tube furnace set to 0
9/10/2012	4:05:46 PM	Helium valve closed
9/10/2012	4:05:46 PM	BCl3 valve closed
9/10/2012	4:05:46 PM	PH3 valve closed
9/10/2012	4:05:46 PM	SiCl4 pre valve closed
9/10/2012	4:05:46 PM	SiCl4 post valve closed
9/10/2012	4:05:46 PM	Main Vac valve closed
9/10/2012	4:05:46 PM	Bypass valve closed
9/10/2012	4:05:46 PM	Bubbler valve closed
9/10/2012	4:05:46 PM	H2 valve opened
9/10/2012	4:05:46 PM	Helium MFC set to  0.000000
9/10/2012	4:05:46 PM	H2 MFC set to  500.000000
9/10/2012	4:05:46 PM	BCl3 MFC set to  0.000000
9/10/2012	4:05:46 PM	PH3 MFC set to  0.000000
9/10/2012	4:05:46 PM	SiCl4 MFC set to  0.000000
9/10/2012	4:05:46 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:05:46 PM	Tube furnace set to 0
9/10/2012	4:06:59 PM	Helium valve closed
9/10/2012	4:06:59 PM	BCl3 valve closed
9/10/2012	4:06:59 PM	PH3 valve closed
9/10/2012	4:06:59 PM	SiCl4 pre valve closed
9/10/2012	4:06:59 PM	SiCl4 post valve closed
9/10/2012	4:06:59 PM	Main Vac valve closed
9/10/2012	4:06:59 PM	Bypass valve closed
9/10/2012	4:06:59 PM	H2 valve opened
9/10/2012	4:06:59 PM	Bubbler valve opened
9/10/2012	4:06:59 PM	Helium MFC set to  0.000000
9/10/2012	4:06:59 PM	H2 MFC set to  500.000000
9/10/2012	4:06:59 PM	BCl3 MFC set to  0.000000
9/10/2012	4:06:59 PM	PH3 MFC set to  0.000000
9/10/2012	4:06:59 PM	SiCl4 MFC set to  0.000000
9/10/2012	4:06:59 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:07:00 PM	Tube furnace set to 0
9/10/2012	4:07:01 PM	Helium valve closed
9/10/2012	4:07:01 PM	BCl3 valve closed
9/10/2012	4:07:01 PM	PH3 valve closed
9/10/2012	4:07:01 PM	SiCl4 pre valve closed
9/10/2012	4:07:01 PM	SiCl4 post valve closed
9/10/2012	4:07:01 PM	Main Vac valve closed
9/10/2012	4:07:01 PM	Bypass valve closed
9/10/2012	4:07:01 PM	H2 valve opened
9/10/2012	4:07:01 PM	Bubbler valve opened
9/10/2012	4:07:01 PM	Helium MFC set to  0.000000
9/10/2012	4:07:01 PM	H2 MFC set to  500.000000
9/10/2012	4:07:01 PM	BCl3 MFC set to  0.000000
9/10/2012	4:07:01 PM	PH3 MFC set to  0.000000
9/10/2012	4:07:01 PM	SiCl4 MFC set to  0.000000
9/10/2012	4:07:01 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:07:01 PM	Tube furnace set to 1000
9/10/2012	4:32:01 PM	Helium valve closed
9/10/2012	4:32:01 PM	PH3 valve closed
9/10/2012	4:32:01 PM	Main Vac valve closed
9/10/2012	4:32:01 PM	Bypass valve closed
9/10/2012	4:32:01 PM	H2 valve opened
9/10/2012	4:32:01 PM	BCl3 valve opened
9/10/2012	4:32:01 PM	SiCl4 pre valve opened
9/10/2012	4:32:01 PM	SiCl4 post valve opened
9/10/2012	4:32:01 PM	Bubbler valve opened
9/10/2012	4:32:01 PM	Helium MFC set to  0.000000
9/10/2012	4:32:01 PM	H2 MFC set to  430.000000
9/10/2012	4:32:01 PM	BCl3 MFC set to  20.000000
9/10/2012	4:32:01 PM	PH3 MFC set to  0.000000
9/10/2012	4:32:01 PM	SiCl4 MFC set to  50.000000
9/10/2012	4:32:01 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:32:01 PM	Tube furnace set to 1000
9/10/2012	4:38:01 PM	Helium valve closed
9/10/2012	4:38:01 PM	PH3 valve closed
9/10/2012	4:38:01 PM	Main Vac valve closed
9/10/2012	4:38:01 PM	Bypass valve closed
9/10/2012	4:38:01 PM	H2 valve opened
9/10/2012	4:38:01 PM	BCl3 valve opened
9/10/2012	4:38:01 PM	SiCl4 pre valve opened
9/10/2012	4:38:01 PM	SiCl4 post valve opened
9/10/2012	4:38:01 PM	Bubbler valve opened
9/10/2012	4:38:01 PM	Helium MFC set to  0.000000
9/10/2012	4:38:01 PM	H2 MFC set to  450.000000
9/10/2012	4:38:01 PM	BCl3 MFC set to  1.000000
9/10/2012	4:38:01 PM	PH3 MFC set to  0.000000
9/10/2012	4:38:01 PM	SiCl4 MFC set to  50.000000
9/10/2012	4:38:01 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:38:01 PM	Tube furnace set to 1000
9/10/2012	4:44:01 PM	Helium valve closed
9/10/2012	4:44:01 PM	BCl3 valve closed
9/10/2012	4:44:01 PM	PH3 valve closed
9/10/2012	4:44:01 PM	Main Vac valve closed
9/10/2012	4:44:01 PM	Bypass valve closed
9/10/2012	4:44:01 PM	H2 valve opened
9/10/2012	4:44:01 PM	SiCl4 pre valve opened
9/10/2012	4:44:01 PM	SiCl4 post valve opened
9/10/2012	4:44:01 PM	Bubbler valve opened
9/10/2012	4:44:01 PM	Helium MFC set to  0.000000
9/10/2012	4:44:01 PM	H2 MFC set to  450.000000
9/10/2012	4:44:01 PM	BCl3 MFC set to  0.000000
9/10/2012	4:44:01 PM	PH3 MFC set to  0.000000
9/10/2012	4:44:01 PM	SiCl4 MFC set to  50.000000
9/10/2012	4:44:01 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:44:01 PM	Tube furnace set to 1000
9/10/2012	4:46:01 PM	Helium valve closed
9/10/2012	4:46:01 PM	BCl3 valve closed
9/10/2012	4:46:01 PM	Main Vac valve closed
9/10/2012	4:46:01 PM	Bypass valve closed
9/10/2012	4:46:01 PM	H2 valve opened
9/10/2012	4:46:01 PM	PH3 valve opened
9/10/2012	4:46:01 PM	SiCl4 pre valve opened
9/10/2012	4:46:01 PM	SiCl4 post valve opened
9/10/2012	4:46:01 PM	Bubbler valve opened
9/10/2012	4:46:01 PM	Helium MFC set to  0.000000
9/10/2012	4:46:01 PM	H2 MFC set to  447.000000
9/10/2012	4:46:01 PM	BCl3 MFC set to  0.000000
9/10/2012	4:46:01 PM	PH3 MFC set to  3.000000
9/10/2012	4:46:01 PM	SiCl4 MFC set to  50.000000
9/10/2012	4:46:01 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:46:02 PM	Tube furnace set to 1000
9/10/2012	4:52:02 PM	Helium valve closed
9/10/2012	4:52:02 PM	BCl3 valve closed
9/10/2012	4:52:02 PM	Main Vac valve closed
9/10/2012	4:52:02 PM	Bypass valve closed
9/10/2012	4:52:02 PM	H2 valve opened
9/10/2012	4:52:02 PM	PH3 valve opened
9/10/2012	4:52:02 PM	SiCl4 pre valve opened
9/10/2012	4:52:02 PM	SiCl4 post valve opened
9/10/2012	4:52:02 PM	Bubbler valve opened
9/10/2012	4:52:02 PM	Helium MFC set to  0.000000
9/10/2012	4:52:02 PM	H2 MFC set to  430.000000
9/10/2012	4:52:02 PM	BCl3 MFC set to  0.000000
9/10/2012	4:52:02 PM	PH3 MFC set to  20.000000
9/10/2012	4:52:02 PM	SiCl4 MFC set to  50.000000
9/10/2012	4:52:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:52:02 PM	Tube furnace set to 1000
9/10/2012	4:58:02 PM	Helium valve closed
9/10/2012	4:58:02 PM	BCl3 valve closed
9/10/2012	4:58:02 PM	PH3 valve closed
9/10/2012	4:58:02 PM	SiCl4 pre valve closed
9/10/2012	4:58:02 PM	SiCl4 post valve closed
9/10/2012	4:58:02 PM	Main Vac valve closed
9/10/2012	4:58:02 PM	Bypass valve closed
9/10/2012	4:58:02 PM	H2 valve opened
9/10/2012	4:58:02 PM	Bubbler valve opened
9/10/2012	4:58:02 PM	Helium MFC set to  0.000000
9/10/2012	4:58:02 PM	H2 MFC set to  500.000000
9/10/2012	4:58:02 PM	BCl3 MFC set to  0.000000
9/10/2012	4:58:02 PM	PH3 MFC set to  0.000000
9/10/2012	4:58:02 PM	SiCl4 MFC set to  0.000000
9/10/2012	4:58:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	4:58:02 PM	Tube furnace set to 750
9/10/2012	5:13:02 PM	H2 valve closed
9/10/2012	5:13:02 PM	BCl3 valve closed
9/10/2012	5:13:02 PM	PH3 valve closed
9/10/2012	5:13:02 PM	SiCl4 pre valve closed
9/10/2012	5:13:02 PM	SiCl4 post valve closed
9/10/2012	5:13:02 PM	Main Vac valve closed
9/10/2012	5:13:02 PM	Bypass valve closed
9/10/2012	5:13:02 PM	Helium valve opened
9/10/2012	5:13:02 PM	Bubbler valve opened
9/10/2012	5:13:02 PM	Helium MFC set to  500.000000
9/10/2012	5:13:02 PM	H2 MFC set to  0.000000
9/10/2012	5:13:02 PM	BCl3 MFC set to  0.000000
9/10/2012	5:13:02 PM	PH3 MFC set to  0.000000
9/10/2012	5:13:02 PM	SiCl4 MFC set to  0.000000
9/10/2012	5:13:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	5:13:02 PM	Tube furnace set to 0
9/10/2012	5:33:02 PM	Helium valve closed
9/10/2012	5:33:02 PM	H2 valve closed
9/10/2012	5:33:02 PM	BCl3 valve closed
9/10/2012	5:33:02 PM	PH3 valve closed
9/10/2012	5:33:02 PM	SiCl4 pre valve closed
9/10/2012	5:33:02 PM	SiCl4 post valve closed
9/10/2012	5:33:02 PM	Main Vac valve closed
9/10/2012	5:33:02 PM	Bypass valve closed
9/10/2012	5:33:02 PM	Bubbler valve closed
9/10/2012	5:33:02 PM	Helium MFC set to  0.000000
9/10/2012	5:33:02 PM	H2 MFC set to  0.000000
9/10/2012	5:33:02 PM	BCl3 MFC set to  0.000000
9/10/2012	5:33:02 PM	PH3 MFC set to  0.000000
9/10/2012	5:33:02 PM	SiCl4 MFC set to  0.000000
9/10/2012	5:33:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	5:33:02 PM	Tube furnace set to 0
9/10/2012	5:50:53 PM	Helium valve closed
9/10/2012	5:50:53 PM	H2 valve closed
9/10/2012	5:50:53 PM	BCl3 valve closed
9/10/2012	5:50:53 PM	PH3 valve closed
9/10/2012	5:50:53 PM	SiCl4 pre valve closed
9/10/2012	5:50:53 PM	SiCl4 post valve closed
9/10/2012	5:50:53 PM	Main Vac valve closed
9/10/2012	5:50:53 PM	Bubbler valve closed
9/10/2012	5:50:53 PM	Bypass valve opened
9/10/2012	5:50:53 PM	Helium MFC set to  0.000000
9/10/2012	5:50:53 PM	H2 MFC set to  0.000000
9/10/2012	5:50:53 PM	BCl3 MFC set to  0.000000
9/10/2012	5:50:53 PM	PH3 MFC set to  0.000000
9/10/2012	5:50:53 PM	SiCl4 MFC set to  0.000000
9/10/2012	5:50:53 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	5:50:53 PM	Tube furnace set to 0
9/10/2012	5:51:59 PM	Helium valve closed
9/10/2012	5:51:59 PM	H2 valve closed
9/10/2012	5:51:59 PM	BCl3 valve closed
9/10/2012	5:51:59 PM	PH3 valve closed
9/10/2012	5:51:59 PM	SiCl4 pre valve closed
9/10/2012	5:51:59 PM	SiCl4 post valve closed
9/10/2012	5:51:59 PM	Main Vac valve closed
9/10/2012	5:51:59 PM	Bubbler valve closed
9/10/2012	5:51:59 PM	Bypass valve opened
9/10/2012	5:51:59 PM	Helium MFC set to  0.000000
9/10/2012	5:51:59 PM	H2 MFC set to  0.000000
9/10/2012	5:51:59 PM	BCl3 MFC set to  0.000000
9/10/2012	5:51:59 PM	PH3 MFC set to  0.000000
9/10/2012	5:51:59 PM	SiCl4 MFC set to  0.000000
9/10/2012	5:51:59 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	5:51:59 PM	Tube furnace set to 0
9/10/2012	5:52:59 PM	Helium valve closed
9/10/2012	5:52:59 PM	H2 valve closed
9/10/2012	5:52:59 PM	BCl3 valve closed
9/10/2012	5:52:59 PM	PH3 valve closed
9/10/2012	5:52:59 PM	SiCl4 pre valve closed
9/10/2012	5:52:59 PM	SiCl4 post valve closed
9/10/2012	5:52:59 PM	Bypass valve closed
9/10/2012	5:52:59 PM	Bubbler valve closed
9/10/2012	5:52:59 PM	Main Vac valve opened
9/10/2012	5:52:59 PM	Helium MFC set to  0.000000
9/10/2012	5:52:59 PM	H2 MFC set to  0.000000
9/10/2012	5:52:59 PM	BCl3 MFC set to  0.000000
9/10/2012	5:52:59 PM	PH3 MFC set to  0.000000
9/10/2012	5:52:59 PM	SiCl4 MFC set to  0.000000
9/10/2012	5:52:59 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	5:52:59 PM	Tube furnace set to 0
9/10/2012	5:53:11 PM	Run finished at 5:53 PM
9/10/2012	5:53:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2012	5:53:16 PM	Recipe started at 5:53 PM
9/10/2012	5:53:16 PM	Helium valve closed
9/10/2012	5:53:16 PM	H2 valve closed
9/10/2012	5:53:16 PM	BCl3 valve closed
9/10/2012	5:53:16 PM	PH3 valve closed
9/10/2012	5:53:16 PM	SiCl4 pre valve closed
9/10/2012	5:53:16 PM	SiCl4 post valve closed
9/10/2012	5:53:16 PM	Main Vac valve closed
9/10/2012	5:53:16 PM	Bypass valve closed
9/10/2012	5:53:16 PM	Bubbler valve closed
9/10/2012	5:53:16 PM	Helium MFC set to  0.000000
9/10/2012	5:53:16 PM	H2 MFC set to  0.000000
9/10/2012	5:53:16 PM	BCl3 MFC set to  0.000000
9/10/2012	5:53:16 PM	PH3 MFC set to  0.000000
9/10/2012	5:53:16 PM	SiCl4 MFC set to  0.000000
9/10/2012	5:53:16 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	5:53:16 PM	Tube furnace set to 0
9/10/2012	5:53:19 PM	H2 valve closed
9/10/2012	5:53:19 PM	BCl3 valve closed
9/10/2012	5:53:19 PM	PH3 valve closed
9/10/2012	5:53:19 PM	SiCl4 pre valve closed
9/10/2012	5:53:19 PM	SiCl4 post valve closed
9/10/2012	5:53:19 PM	Main Vac valve closed
9/10/2012	5:53:19 PM	Bypass valve closed
9/10/2012	5:53:19 PM	Bubbler valve closed
9/10/2012	5:53:19 PM	Helium valve opened
9/10/2012	5:53:19 PM	Helium MFC set to  500.000000
9/10/2012	5:53:19 PM	H2 MFC set to  0.000000
9/10/2012	5:53:19 PM	BCl3 MFC set to  0.000000
9/10/2012	5:53:19 PM	PH3 MFC set to  0.000000
9/10/2012	5:53:19 PM	SiCl4 MFC set to  0.000000
9/10/2012	5:53:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	5:53:20 PM	Tube furnace set to 0
9/10/2012	5:54:30 PM	Helium valve closed
9/10/2012	5:54:30 PM	H2 valve closed
9/10/2012	5:54:30 PM	BCl3 valve closed
9/10/2012	5:54:30 PM	PH3 valve closed
9/10/2012	5:54:30 PM	SiCl4 pre valve closed
9/10/2012	5:54:30 PM	SiCl4 post valve closed
9/10/2012	5:54:30 PM	Main Vac valve closed
9/10/2012	5:54:30 PM	Bypass valve closed
9/10/2012	5:54:30 PM	Bubbler valve closed
9/10/2012	5:54:30 PM	Helium MFC set to  0.000000
9/10/2012	5:54:30 PM	H2 MFC set to  0.000000
9/10/2012	5:54:30 PM	BCl3 MFC set to  0.000000
9/10/2012	5:54:30 PM	PH3 MFC set to  0.000000
9/10/2012	5:54:30 PM	SiCl4 MFC set to  0.000000
9/10/2012	5:54:30 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	5:54:30 PM	Tube furnace set to 0
9/10/2012	5:54:31 PM	Run finished at 5:54 PM
9/10/2012	5:54:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2012	6:04:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2012	6:04:56 PM	Recipe started at 6:04 PM
9/10/2012	6:04:56 PM	Helium valve closed
9/10/2012	6:04:56 PM	H2 valve closed
9/10/2012	6:04:56 PM	BCl3 valve closed
9/10/2012	6:04:56 PM	PH3 valve closed
9/10/2012	6:04:56 PM	SiCl4 pre valve closed
9/10/2012	6:04:56 PM	SiCl4 post valve closed
9/10/2012	6:04:56 PM	Main Vac valve closed
9/10/2012	6:04:56 PM	Bubbler valve closed
9/10/2012	6:04:56 PM	Bypass valve opened
9/10/2012	6:04:56 PM	Helium MFC set to  0.000000
9/10/2012	6:04:56 PM	H2 MFC set to  0.000000
9/10/2012	6:04:56 PM	BCl3 MFC set to  0.000000
9/10/2012	6:04:56 PM	PH3 MFC set to  0.000000
9/10/2012	6:04:56 PM	SiCl4 MFC set to  0.000000
9/10/2012	6:04:56 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	6:04:56 PM	Tube furnace set to 0
9/10/2012	6:06:22 PM	Helium valve closed
9/10/2012	6:06:22 PM	H2 valve closed
9/10/2012	6:06:22 PM	BCl3 valve closed
9/10/2012	6:06:22 PM	PH3 valve closed
9/10/2012	6:06:22 PM	SiCl4 pre valve closed
9/10/2012	6:06:22 PM	SiCl4 post valve closed
9/10/2012	6:06:22 PM	Main Vac valve closed
9/10/2012	6:06:22 PM	Bubbler valve closed
9/10/2012	6:06:22 PM	Bypass valve opened
9/10/2012	6:06:22 PM	Helium MFC set to  0.000000
9/10/2012	6:06:22 PM	H2 MFC set to  0.000000
9/10/2012	6:06:22 PM	BCl3 MFC set to  0.000000
9/10/2012	6:06:22 PM	PH3 MFC set to  0.000000
9/10/2012	6:06:22 PM	SiCl4 MFC set to  0.000000
9/10/2012	6:06:22 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	6:06:22 PM	Tube furnace set to 0
9/10/2012	6:07:22 PM	Helium valve closed
9/10/2012	6:07:22 PM	H2 valve closed
9/10/2012	6:07:22 PM	BCl3 valve closed
9/10/2012	6:07:22 PM	PH3 valve closed
9/10/2012	6:07:22 PM	SiCl4 pre valve closed
9/10/2012	6:07:22 PM	SiCl4 post valve closed
9/10/2012	6:07:22 PM	Bypass valve closed
9/10/2012	6:07:22 PM	Bubbler valve closed
9/10/2012	6:07:22 PM	Main Vac valve opened
9/10/2012	6:07:22 PM	Helium MFC set to  0.000000
9/10/2012	6:07:22 PM	H2 MFC set to  0.000000
9/10/2012	6:07:22 PM	BCl3 MFC set to  0.000000
9/10/2012	6:07:22 PM	PH3 MFC set to  0.000000
9/10/2012	6:07:22 PM	SiCl4 MFC set to  0.000000
9/10/2012	6:07:22 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	6:07:23 PM	Tube furnace set to 0
9/10/2012	6:07:24 PM	Run finished at 6:07 PM
9/10/2012	6:07:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2012	6:09:59 PM	Recipe started at 6:09 PM
9/10/2012	6:09:59 PM	Helium valve closed
9/10/2012	6:09:59 PM	H2 valve closed
9/10/2012	6:09:59 PM	BCl3 valve closed
9/10/2012	6:09:59 PM	PH3 valve closed
9/10/2012	6:09:59 PM	SiCl4 pre valve closed
9/10/2012	6:09:59 PM	SiCl4 post valve closed
9/10/2012	6:09:59 PM	Bypass valve closed
9/10/2012	6:09:59 PM	Bubbler valve closed
9/10/2012	6:09:59 PM	Main Vac valve opened
9/10/2012	6:09:59 PM	Helium MFC set to  0.000000
9/10/2012	6:09:59 PM	H2 MFC set to  0.000000
9/10/2012	6:09:59 PM	BCl3 MFC set to  0.000000
9/10/2012	6:09:59 PM	PH3 MFC set to  0.000000
9/10/2012	6:09:59 PM	SiCl4 MFC set to  0.000000
9/10/2012	6:09:59 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	6:09:59 PM	Tube furnace set to 0
9/10/2012	7:39:59 PM	Helium valve closed
9/10/2012	7:39:59 PM	H2 valve closed
9/10/2012	7:39:59 PM	BCl3 valve closed
9/10/2012	7:39:59 PM	PH3 valve closed
9/10/2012	7:39:59 PM	SiCl4 pre valve closed
9/10/2012	7:39:59 PM	SiCl4 post valve closed
9/10/2012	7:39:59 PM	Main Vac valve closed
9/10/2012	7:39:59 PM	Bypass valve closed
9/10/2012	7:39:59 PM	Bubbler valve closed
9/10/2012	7:39:59 PM	Helium MFC set to  0.000000
9/10/2012	7:39:59 PM	H2 MFC set to  0.000000
9/10/2012	7:39:59 PM	BCl3 MFC set to  0.000000
9/10/2012	7:39:59 PM	PH3 MFC set to  0.000000
9/10/2012	7:39:59 PM	SiCl4 MFC set to  0.000000
9/10/2012	7:39:59 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	7:39:59 PM	Tube furnace set to 0
9/10/2012	7:40:02 PM	Helium valve closed
9/10/2012	7:40:02 PM	BCl3 valve closed
9/10/2012	7:40:02 PM	PH3 valve closed
9/10/2012	7:40:02 PM	SiCl4 pre valve closed
9/10/2012	7:40:02 PM	SiCl4 post valve closed
9/10/2012	7:40:02 PM	Main Vac valve closed
9/10/2012	7:40:02 PM	Bypass valve closed
9/10/2012	7:40:02 PM	Bubbler valve closed
9/10/2012	7:40:02 PM	H2 valve opened
9/10/2012	7:40:02 PM	Helium MFC set to  0.000000
9/10/2012	7:40:02 PM	H2 MFC set to  500.000000
9/10/2012	7:40:02 PM	BCl3 MFC set to  0.000000
9/10/2012	7:40:02 PM	PH3 MFC set to  0.000000
9/10/2012	7:40:02 PM	SiCl4 MFC set to  0.000000
9/10/2012	7:40:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	7:40:02 PM	Tube furnace set to 0
9/10/2012	7:41:16 PM	Helium valve closed
9/10/2012	7:41:16 PM	BCl3 valve closed
9/10/2012	7:41:16 PM	PH3 valve closed
9/10/2012	7:41:16 PM	SiCl4 pre valve closed
9/10/2012	7:41:16 PM	SiCl4 post valve closed
9/10/2012	7:41:16 PM	Main Vac valve closed
9/10/2012	7:41:16 PM	Bypass valve closed
9/10/2012	7:41:16 PM	H2 valve opened
9/10/2012	7:41:16 PM	Bubbler valve opened
9/10/2012	7:41:16 PM	Helium MFC set to  0.000000
9/10/2012	7:41:16 PM	H2 MFC set to  500.000000
9/10/2012	7:41:16 PM	BCl3 MFC set to  0.000000
9/10/2012	7:41:16 PM	PH3 MFC set to  0.000000
9/10/2012	7:41:16 PM	SiCl4 MFC set to  0.000000
9/10/2012	7:41:16 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	7:41:16 PM	Tube furnace set to 0
9/10/2012	7:41:17 PM	Helium valve closed
9/10/2012	7:41:17 PM	BCl3 valve closed
9/10/2012	7:41:17 PM	PH3 valve closed
9/10/2012	7:41:17 PM	SiCl4 pre valve closed
9/10/2012	7:41:17 PM	SiCl4 post valve closed
9/10/2012	7:41:17 PM	Main Vac valve closed
9/10/2012	7:41:17 PM	Bypass valve closed
9/10/2012	7:41:17 PM	H2 valve opened
9/10/2012	7:41:17 PM	Bubbler valve opened
9/10/2012	7:41:17 PM	Helium MFC set to  0.000000
9/10/2012	7:41:17 PM	H2 MFC set to  500.000000
9/10/2012	7:41:17 PM	BCl3 MFC set to  0.000000
9/10/2012	7:41:17 PM	PH3 MFC set to  0.000000
9/10/2012	7:41:17 PM	SiCl4 MFC set to  0.000000
9/10/2012	7:41:17 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	7:41:17 PM	Tube furnace set to 1000
9/10/2012	8:06:17 PM	Helium valve closed
9/10/2012	8:06:17 PM	PH3 valve closed
9/10/2012	8:06:17 PM	Main Vac valve closed
9/10/2012	8:06:17 PM	Bypass valve closed
9/10/2012	8:06:17 PM	H2 valve opened
9/10/2012	8:06:17 PM	BCl3 valve opened
9/10/2012	8:06:17 PM	SiCl4 pre valve opened
9/10/2012	8:06:17 PM	SiCl4 post valve opened
9/10/2012	8:06:17 PM	Bubbler valve opened
9/10/2012	8:06:17 PM	Helium MFC set to  0.000000
9/10/2012	8:06:17 PM	H2 MFC set to  430.000000
9/10/2012	8:06:17 PM	BCl3 MFC set to  20.000000
9/10/2012	8:06:17 PM	PH3 MFC set to  0.000000
9/10/2012	8:06:17 PM	SiCl4 MFC set to  50.000000
9/10/2012	8:06:17 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	8:06:18 PM	Tube furnace set to 1000
9/10/2012	8:12:48 PM	Helium valve closed
9/10/2012	8:12:48 PM	PH3 valve closed
9/10/2012	8:12:48 PM	Main Vac valve closed
9/10/2012	8:12:48 PM	Bypass valve closed
9/10/2012	8:12:48 PM	H2 valve opened
9/10/2012	8:12:48 PM	BCl3 valve opened
9/10/2012	8:12:48 PM	SiCl4 pre valve opened
9/10/2012	8:12:48 PM	SiCl4 post valve opened
9/10/2012	8:12:48 PM	Bubbler valve opened
9/10/2012	8:12:48 PM	Helium MFC set to  0.000000
9/10/2012	8:12:48 PM	H2 MFC set to  450.000000
9/10/2012	8:12:48 PM	BCl3 MFC set to  1.000000
9/10/2012	8:12:48 PM	PH3 MFC set to  0.000000
9/10/2012	8:12:48 PM	SiCl4 MFC set to  50.000000
9/10/2012	8:12:48 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	8:12:48 PM	Tube furnace set to 1000
9/10/2012	8:19:18 PM	Helium valve closed
9/10/2012	8:19:18 PM	BCl3 valve closed
9/10/2012	8:19:18 PM	Main Vac valve closed
9/10/2012	8:19:18 PM	Bypass valve closed
9/10/2012	8:19:18 PM	H2 valve opened
9/10/2012	8:19:18 PM	PH3 valve opened
9/10/2012	8:19:18 PM	SiCl4 pre valve opened
9/10/2012	8:19:18 PM	SiCl4 post valve opened
9/10/2012	8:19:18 PM	Bubbler valve opened
9/10/2012	8:19:18 PM	Helium MFC set to  0.000000
9/10/2012	8:19:18 PM	H2 MFC set to  450.000000
9/10/2012	8:19:18 PM	BCl3 MFC set to  0.000000
9/10/2012	8:19:18 PM	PH3 MFC set to  1.500000
9/10/2012	8:19:18 PM	SiCl4 MFC set to  50.000000
9/10/2012	8:19:18 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	8:19:18 PM	Tube furnace set to 1000
9/10/2012	8:25:48 PM	Helium valve closed
9/10/2012	8:25:48 PM	BCl3 valve closed
9/10/2012	8:25:48 PM	Main Vac valve closed
9/10/2012	8:25:48 PM	Bypass valve closed
9/10/2012	8:25:48 PM	H2 valve opened
9/10/2012	8:25:48 PM	PH3 valve opened
9/10/2012	8:25:48 PM	SiCl4 pre valve opened
9/10/2012	8:25:48 PM	SiCl4 post valve opened
9/10/2012	8:25:48 PM	Bubbler valve opened
9/10/2012	8:25:48 PM	Helium MFC set to  0.000000
9/10/2012	8:25:48 PM	H2 MFC set to  430.000000
9/10/2012	8:25:48 PM	BCl3 MFC set to  0.000000
9/10/2012	8:25:48 PM	PH3 MFC set to  20.000000
9/10/2012	8:25:48 PM	SiCl4 MFC set to  50.000000
9/10/2012	8:25:48 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	8:25:48 PM	Tube furnace set to 1000
9/10/2012	8:32:18 PM	Helium valve closed
9/10/2012	8:32:18 PM	BCl3 valve closed
9/10/2012	8:32:18 PM	PH3 valve closed
9/10/2012	8:32:18 PM	SiCl4 pre valve closed
9/10/2012	8:32:18 PM	SiCl4 post valve closed
9/10/2012	8:32:18 PM	Main Vac valve closed
9/10/2012	8:32:18 PM	Bypass valve closed
9/10/2012	8:32:18 PM	H2 valve opened
9/10/2012	8:32:18 PM	Bubbler valve opened
9/10/2012	8:32:18 PM	Helium MFC set to  0.000000
9/10/2012	8:32:18 PM	H2 MFC set to  500.000000
9/10/2012	8:32:18 PM	BCl3 MFC set to  0.000000
9/10/2012	8:32:18 PM	PH3 MFC set to  0.000000
9/10/2012	8:32:18 PM	SiCl4 MFC set to  0.000000
9/10/2012	8:32:18 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	8:32:19 PM	Tube furnace set to 750
9/10/2012	8:47:18 PM	H2 valve closed
9/10/2012	8:47:18 PM	BCl3 valve closed
9/10/2012	8:47:18 PM	PH3 valve closed
9/10/2012	8:47:18 PM	SiCl4 pre valve closed
9/10/2012	8:47:18 PM	SiCl4 post valve closed
9/10/2012	8:47:19 PM	Main Vac valve closed
9/10/2012	8:47:19 PM	Bypass valve closed
9/10/2012	8:47:19 PM	Helium valve opened
9/10/2012	8:47:19 PM	Bubbler valve opened
9/10/2012	8:47:19 PM	Helium MFC set to  500.000000
9/10/2012	8:47:19 PM	H2 MFC set to  0.000000
9/10/2012	8:47:19 PM	BCl3 MFC set to  0.000000
9/10/2012	8:47:19 PM	PH3 MFC set to  0.000000
9/10/2012	8:47:19 PM	SiCl4 MFC set to  0.000000
9/10/2012	8:47:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	8:47:19 PM	Tube furnace set to 0
9/10/2012	9:07:19 PM	Helium valve closed
9/10/2012	9:07:19 PM	H2 valve closed
9/10/2012	9:07:19 PM	BCl3 valve closed
9/10/2012	9:07:19 PM	PH3 valve closed
9/10/2012	9:07:19 PM	SiCl4 pre valve closed
9/10/2012	9:07:19 PM	SiCl4 post valve closed
9/10/2012	9:07:19 PM	Main Vac valve closed
9/10/2012	9:07:19 PM	Bypass valve closed
9/10/2012	9:07:19 PM	Bubbler valve closed
9/10/2012	9:07:19 PM	Helium MFC set to  0.000000
9/10/2012	9:07:19 PM	H2 MFC set to  0.000000
9/10/2012	9:07:19 PM	BCl3 MFC set to  0.000000
9/10/2012	9:07:19 PM	PH3 MFC set to  0.000000
9/10/2012	9:07:19 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:07:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:07:19 PM	Tube furnace set to 0
9/10/2012	9:27:19 PM	Helium valve closed
9/10/2012	9:27:19 PM	H2 valve closed
9/10/2012	9:27:19 PM	BCl3 valve closed
9/10/2012	9:27:19 PM	PH3 valve closed
9/10/2012	9:27:19 PM	SiCl4 pre valve closed
9/10/2012	9:27:19 PM	SiCl4 post valve closed
9/10/2012	9:27:19 PM	Main Vac valve closed
9/10/2012	9:27:19 PM	Bubbler valve closed
9/10/2012	9:27:19 PM	Bypass valve opened
9/10/2012	9:27:19 PM	Helium MFC set to  0.000000
9/10/2012	9:27:19 PM	H2 MFC set to  0.000000
9/10/2012	9:27:19 PM	BCl3 MFC set to  0.000000
9/10/2012	9:27:19 PM	PH3 MFC set to  0.000000
9/10/2012	9:27:19 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:27:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:27:19 PM	Tube furnace set to 0
9/10/2012	9:28:19 PM	Helium valve closed
9/10/2012	9:28:19 PM	H2 valve closed
9/10/2012	9:28:19 PM	BCl3 valve closed
9/10/2012	9:28:19 PM	PH3 valve closed
9/10/2012	9:28:19 PM	SiCl4 pre valve closed
9/10/2012	9:28:19 PM	SiCl4 post valve closed
9/10/2012	9:28:19 PM	Main Vac valve closed
9/10/2012	9:28:19 PM	Bubbler valve closed
9/10/2012	9:28:19 PM	Bypass valve opened
9/10/2012	9:28:19 PM	Helium MFC set to  0.000000
9/10/2012	9:28:19 PM	H2 MFC set to  0.000000
9/10/2012	9:28:19 PM	BCl3 MFC set to  0.000000
9/10/2012	9:28:19 PM	PH3 MFC set to  0.000000
9/10/2012	9:28:19 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:28:19 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:28:19 PM	Tube furnace set to 0
9/10/2012	9:29:07 PM	Run aborted at 9:29 PM
9/10/2012	9:29:07 PM	Helium valve closed
9/10/2012	9:29:07 PM	H2 valve closed
9/10/2012	9:29:07 PM	BCl3 valve closed
9/10/2012	9:29:07 PM	PH3 valve closed
9/10/2012	9:29:07 PM	SiCl4 pre valve closed
9/10/2012	9:29:07 PM	SiCl4 post valve closed
9/10/2012	9:29:07 PM	Bypass valve closed
9/10/2012	9:29:07 PM	Main Vac valve closed
9/10/2012	9:29:07 PM	Bubbler valve closed
9/10/2012	9:29:07 PM	Helium MFC set to  0.000000
9/10/2012	9:29:07 PM	H2 MFC set to  0.000000
9/10/2012	9:29:07 PM	BCl3 MFC set to  0.000000
9/10/2012	9:29:07 PM	PH3 MFC set to  0.000000
9/10/2012	9:29:07 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:29:08 PM	Tube furnace set to 0
9/10/2012	9:29:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2012	9:29:12 PM	Recipe started at 9:29 PM
9/10/2012	9:29:12 PM	Helium valve closed
9/10/2012	9:29:12 PM	H2 valve closed
9/10/2012	9:29:12 PM	BCl3 valve closed
9/10/2012	9:29:12 PM	PH3 valve closed
9/10/2012	9:29:12 PM	SiCl4 pre valve closed
9/10/2012	9:29:12 PM	SiCl4 post valve closed
9/10/2012	9:29:12 PM	Main Vac valve closed
9/10/2012	9:29:12 PM	Bypass valve closed
9/10/2012	9:29:12 PM	Bubbler valve closed
9/10/2012	9:29:12 PM	Helium MFC set to  0.000000
9/10/2012	9:29:12 PM	H2 MFC set to  0.000000
9/10/2012	9:29:12 PM	BCl3 MFC set to  0.000000
9/10/2012	9:29:12 PM	PH3 MFC set to  0.000000
9/10/2012	9:29:12 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:29:12 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:29:12 PM	Tube furnace set to 0
9/10/2012	9:29:15 PM	H2 valve closed
9/10/2012	9:29:15 PM	BCl3 valve closed
9/10/2012	9:29:15 PM	PH3 valve closed
9/10/2012	9:29:15 PM	SiCl4 pre valve closed
9/10/2012	9:29:15 PM	SiCl4 post valve closed
9/10/2012	9:29:15 PM	Main Vac valve closed
9/10/2012	9:29:15 PM	Bypass valve closed
9/10/2012	9:29:15 PM	Bubbler valve closed
9/10/2012	9:29:15 PM	Helium valve opened
9/10/2012	9:29:15 PM	Helium MFC set to  500.000000
9/10/2012	9:29:15 PM	H2 MFC set to  0.000000
9/10/2012	9:29:15 PM	BCl3 MFC set to  0.000000
9/10/2012	9:29:15 PM	PH3 MFC set to  0.000000
9/10/2012	9:29:15 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:29:15 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:29:15 PM	Tube furnace set to 0
9/10/2012	9:30:24 PM	Helium valve closed
9/10/2012	9:30:24 PM	H2 valve closed
9/10/2012	9:30:24 PM	BCl3 valve closed
9/10/2012	9:30:24 PM	PH3 valve closed
9/10/2012	9:30:24 PM	SiCl4 pre valve closed
9/10/2012	9:30:24 PM	SiCl4 post valve closed
9/10/2012	9:30:24 PM	Main Vac valve closed
9/10/2012	9:30:24 PM	Bypass valve closed
9/10/2012	9:30:24 PM	Bubbler valve closed
9/10/2012	9:30:24 PM	Helium MFC set to  0.000000
9/10/2012	9:30:24 PM	H2 MFC set to  0.000000
9/10/2012	9:30:24 PM	BCl3 MFC set to  0.000000
9/10/2012	9:30:24 PM	PH3 MFC set to  0.000000
9/10/2012	9:30:24 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:30:24 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:30:24 PM	Tube furnace set to 0
9/10/2012	9:30:25 PM	Run finished at 9:30 PM
9/10/2012	9:30:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/10/2012	9:33:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2012	9:33:23 PM	Recipe started at 9:33 PM
9/10/2012	9:33:23 PM	Helium valve closed
9/10/2012	9:33:23 PM	H2 valve closed
9/10/2012	9:33:23 PM	BCl3 valve closed
9/10/2012	9:33:23 PM	PH3 valve closed
9/10/2012	9:33:23 PM	SiCl4 pre valve closed
9/10/2012	9:33:23 PM	SiCl4 post valve closed
9/10/2012	9:33:23 PM	Main Vac valve closed
9/10/2012	9:33:23 PM	Bubbler valve closed
9/10/2012	9:33:23 PM	Bypass valve opened
9/10/2012	9:33:23 PM	Helium MFC set to  0.000000
9/10/2012	9:33:23 PM	H2 MFC set to  0.000000
9/10/2012	9:33:23 PM	BCl3 MFC set to  0.000000
9/10/2012	9:33:23 PM	PH3 MFC set to  0.000000
9/10/2012	9:33:23 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:33:23 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:33:23 PM	Tube furnace set to 0
9/10/2012	9:34:35 PM	Helium valve closed
9/10/2012	9:34:35 PM	H2 valve closed
9/10/2012	9:34:35 PM	BCl3 valve closed
9/10/2012	9:34:35 PM	PH3 valve closed
9/10/2012	9:34:35 PM	SiCl4 pre valve closed
9/10/2012	9:34:35 PM	SiCl4 post valve closed
9/10/2012	9:34:35 PM	Main Vac valve closed
9/10/2012	9:34:35 PM	Bubbler valve closed
9/10/2012	9:34:35 PM	Bypass valve opened
9/10/2012	9:34:35 PM	Helium MFC set to  0.000000
9/10/2012	9:34:35 PM	H2 MFC set to  0.000000
9/10/2012	9:34:35 PM	BCl3 MFC set to  0.000000
9/10/2012	9:34:35 PM	PH3 MFC set to  0.000000
9/10/2012	9:34:35 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:34:35 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:34:35 PM	Tube furnace set to 0
9/10/2012	9:35:35 PM	Helium valve closed
9/10/2012	9:35:35 PM	H2 valve closed
9/10/2012	9:35:35 PM	BCl3 valve closed
9/10/2012	9:35:35 PM	PH3 valve closed
9/10/2012	9:35:35 PM	SiCl4 pre valve closed
9/10/2012	9:35:35 PM	SiCl4 post valve closed
9/10/2012	9:35:35 PM	Bypass valve closed
9/10/2012	9:35:35 PM	Bubbler valve closed
9/10/2012	9:35:35 PM	Main Vac valve opened
9/10/2012	9:35:35 PM	Helium MFC set to  0.000000
9/10/2012	9:35:36 PM	H2 MFC set to  0.000000
9/10/2012	9:35:36 PM	BCl3 MFC set to  0.000000
9/10/2012	9:35:36 PM	PH3 MFC set to  0.000000
9/10/2012	9:35:36 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:35:36 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:35:36 PM	Tube furnace set to 0
9/10/2012	9:35:37 PM	Run finished at 9:35 PM
9/10/2012	9:35:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/10/2012	9:37:46 PM	Recipe started at 9:37 PM
9/10/2012	9:37:46 PM	Helium valve closed
9/10/2012	9:37:46 PM	H2 valve closed
9/10/2012	9:37:46 PM	BCl3 valve closed
9/10/2012	9:37:46 PM	PH3 valve closed
9/10/2012	9:37:46 PM	SiCl4 pre valve closed
9/10/2012	9:37:46 PM	SiCl4 post valve closed
9/10/2012	9:37:46 PM	Bypass valve closed
9/10/2012	9:37:46 PM	Bubbler valve closed
9/10/2012	9:37:46 PM	Main Vac valve opened
9/10/2012	9:37:46 PM	Helium MFC set to  0.000000
9/10/2012	9:37:46 PM	H2 MFC set to  0.000000
9/10/2012	9:37:46 PM	BCl3 MFC set to  0.000000
9/10/2012	9:37:46 PM	PH3 MFC set to  0.000000
9/10/2012	9:37:46 PM	SiCl4 MFC set to  0.000000
9/10/2012	9:37:46 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	9:37:46 PM	Tube furnace set to 0
9/10/2012	11:07:46 PM	Helium valve closed
9/10/2012	11:07:46 PM	H2 valve closed
9/10/2012	11:07:46 PM	BCl3 valve closed
9/10/2012	11:07:46 PM	PH3 valve closed
9/10/2012	11:07:46 PM	SiCl4 pre valve closed
9/10/2012	11:07:46 PM	SiCl4 post valve closed
9/10/2012	11:07:46 PM	Main Vac valve closed
9/10/2012	11:07:46 PM	Bypass valve closed
9/10/2012	11:07:46 PM	Bubbler valve closed
9/10/2012	11:07:46 PM	Helium MFC set to  0.000000
9/10/2012	11:07:46 PM	H2 MFC set to  0.000000
9/10/2012	11:07:46 PM	BCl3 MFC set to  0.000000
9/10/2012	11:07:46 PM	PH3 MFC set to  0.000000
9/10/2012	11:07:46 PM	SiCl4 MFC set to  0.000000
9/10/2012	11:07:46 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	11:07:46 PM	Tube furnace set to 0
9/10/2012	11:07:49 PM	Helium valve closed
9/10/2012	11:07:49 PM	BCl3 valve closed
9/10/2012	11:07:49 PM	PH3 valve closed
9/10/2012	11:07:49 PM	SiCl4 pre valve closed
9/10/2012	11:07:49 PM	SiCl4 post valve closed
9/10/2012	11:07:49 PM	Main Vac valve closed
9/10/2012	11:07:49 PM	Bypass valve closed
9/10/2012	11:07:49 PM	Bubbler valve closed
9/10/2012	11:07:49 PM	H2 valve opened
9/10/2012	11:07:49 PM	Helium MFC set to  0.000000
9/10/2012	11:07:49 PM	H2 MFC set to  500.000000
9/10/2012	11:07:49 PM	BCl3 MFC set to  0.000000
9/10/2012	11:07:49 PM	PH3 MFC set to  0.000000
9/10/2012	11:07:49 PM	SiCl4 MFC set to  0.000000
9/10/2012	11:07:49 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	11:07:49 PM	Tube furnace set to 0
9/10/2012	11:09:02 PM	Helium valve closed
9/10/2012	11:09:02 PM	BCl3 valve closed
9/10/2012	11:09:02 PM	PH3 valve closed
9/10/2012	11:09:02 PM	SiCl4 pre valve closed
9/10/2012	11:09:02 PM	SiCl4 post valve closed
9/10/2012	11:09:02 PM	Main Vac valve closed
9/10/2012	11:09:02 PM	Bypass valve closed
9/10/2012	11:09:02 PM	H2 valve opened
9/10/2012	11:09:02 PM	Bubbler valve opened
9/10/2012	11:09:02 PM	Helium MFC set to  0.000000
9/10/2012	11:09:02 PM	H2 MFC set to  500.000000
9/10/2012	11:09:02 PM	BCl3 MFC set to  0.000000
9/10/2012	11:09:02 PM	PH3 MFC set to  0.000000
9/10/2012	11:09:02 PM	SiCl4 MFC set to  0.000000
9/10/2012	11:09:02 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	11:09:03 PM	Tube furnace set to 0
9/10/2012	11:09:04 PM	Helium valve closed
9/10/2012	11:09:04 PM	BCl3 valve closed
9/10/2012	11:09:04 PM	PH3 valve closed
9/10/2012	11:09:04 PM	SiCl4 pre valve closed
9/10/2012	11:09:04 PM	SiCl4 post valve closed
9/10/2012	11:09:04 PM	Main Vac valve closed
9/10/2012	11:09:04 PM	Bypass valve closed
9/10/2012	11:09:04 PM	H2 valve opened
9/10/2012	11:09:04 PM	Bubbler valve opened
9/10/2012	11:09:04 PM	Helium MFC set to  0.000000
9/10/2012	11:09:04 PM	H2 MFC set to  500.000000
9/10/2012	11:09:04 PM	BCl3 MFC set to  0.000000
9/10/2012	11:09:04 PM	PH3 MFC set to  0.000000
9/10/2012	11:09:04 PM	SiCl4 MFC set to  0.000000
9/10/2012	11:09:04 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	11:09:04 PM	Tube furnace set to 1000
9/10/2012	11:34:04 PM	Helium valve closed
9/10/2012	11:34:04 PM	BCl3 valve closed
9/10/2012	11:34:04 PM	Main Vac valve closed
9/10/2012	11:34:04 PM	Bypass valve closed
9/10/2012	11:34:04 PM	H2 valve opened
9/10/2012	11:34:04 PM	PH3 valve opened
9/10/2012	11:34:04 PM	SiCl4 pre valve opened
9/10/2012	11:34:04 PM	SiCl4 post valve opened
9/10/2012	11:34:04 PM	Bubbler valve opened
9/10/2012	11:34:04 PM	Helium MFC set to  0.000000
9/10/2012	11:34:04 PM	H2 MFC set to  450.000000
9/10/2012	11:34:04 PM	BCl3 MFC set to  0.000000
9/10/2012	11:34:04 PM	PH3 MFC set to  1.500000
9/10/2012	11:34:04 PM	SiCl4 MFC set to  50.000000
9/10/2012	11:34:04 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	11:34:04 PM	Tube furnace set to 1000
9/10/2012	11:54:04 PM	Helium valve closed
9/10/2012	11:54:04 PM	BCl3 valve closed
9/10/2012	11:54:04 PM	PH3 valve closed
9/10/2012	11:54:04 PM	SiCl4 pre valve closed
9/10/2012	11:54:04 PM	SiCl4 post valve closed
9/10/2012	11:54:04 PM	Main Vac valve closed
9/10/2012	11:54:04 PM	Bypass valve closed
9/10/2012	11:54:04 PM	H2 valve opened
9/10/2012	11:54:04 PM	Bubbler valve opened
9/10/2012	11:54:04 PM	Helium MFC set to  0.000000
9/10/2012	11:54:04 PM	H2 MFC set to  500.000000
9/10/2012	11:54:04 PM	BCl3 MFC set to  0.000000
9/10/2012	11:54:04 PM	PH3 MFC set to  0.000000
9/10/2012	11:54:04 PM	SiCl4 MFC set to  0.000000
9/10/2012	11:54:04 PM	Bypass solenoid MFC set to  0.000000
9/10/2012	11:54:04 PM	Tube furnace set to 750
